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Overhead Hoist Transport（OHT） Conveyor Autonomous Robot（AMR）

Foup/Pod Stocker Reticle Stocker Tower Stocker Near Tool Buffer Tool Loadport Station(TLP) OHB Purge(OHBP) Reticle Cabinet Wafer Cassette Load Port Station(LPS) E-Rack

AMHS Material Control System AMHS Analysis & Monitoring System